Comparison ledger
KLA .204 PSL Wafer, Olympus STM 7 MF Measuring, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | STM 7 MF MeasuringOlympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Olympus STM 7 MF Measuring |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Vertical movement range | — | 175 mm[4] |
| Maximum measurable height | — | 120 mm (with measurement objective), 175 mm (with metallurgical objective)[4] |
| Z-axis measurement resolution | — | 0.1 μm[4] |
| Z-axis drive method | — | Manual coaxial fine/coarse focusing knobs[4] |
| Illumination | — | LED illumination; white for reflected light, green for transmitted light[4] |
| Observation tube | — | Erect image monocular tube, erect image trinocular tube (100:0/0:100)[4] |
| Objective | — | For measuring microscope MM6-OB series; for metallurgical microscope MPLFLN series, LMPLFLN series, MPLFLN-BD series, LMPLFLN-BD series[4] |
| Eyepiece | — | MM6-OCC10X (with cross hairs, FN 22), MM6-OC10X (FN 22)[4] |
| Stage measuring range (STM7-CS200) | — | X-axis 200 mm, Y-axis 200 mm[4] |
| Measurement accuracy (L: measuring length) | — | (3+4L/200) μm[4] |
| Accuracy assurance weight | — | 10 kg[4] |
| Number of axes (counter display) | — | Three[4] |
| Units (counter display) | — | mm/μm/inch/mil[4] |
| Minimum resolution (counter display) | — | 0.1 μm[4] |
| Dimensions (W x D x H) | — | 606 x 762 x 651 mm[4] |
| Weight | — | 152 kg (approx.)[4] |
| Power consumption | — | 100-120/220-240V ~ 50/60Hz 0.3A/0.2A[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →