Waferpedia

Comparison ledger

.204 PSL WaferversusSZ6045TR

KLA .204 PSL Wafer, Olympus SZ6045TR, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
SZ6045TROlympus
OEMKLAOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferOlympus SZ6045TR
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[2]—
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
OEM—Olympus[4]
Model—SZ6045TR[4]
Category—Binocular microscope[4]
Location—Z17[4]
Equipment type—Zoom stereo microscope[5]
Zoom ratio—6.3[5]
Working distance—100 mm[5]
Classification in facility inventory—Binocular microscope[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]epfl.chepfl.ch
  5. [5]alanwood.netalanwood.net