Comparison ledger
KLA .204 PSL Wafer, Olympus Vanox, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VanoxOlympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Olympus Vanox |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Platform type | — | Universal research microscope[4] |
| System design | — | Modular building-block system of interchangeable accessories[4] |
| Observation tube | — | Binocular tube with photo tube[4] |
| Observation tube inclination | — | 30°[5] |
| Interpupillary distance adjustment range | — | 56 mm to 75 mm[5] |
| Diopter adjustment range | — | -8 to +2 diop.[5] |
| Revolving nosepiece | — | Five-objective opening nosepiece; sextuple nosepiece optionally available[6] |
| Stage | — | 170 mm x 172 mm stage with 300° rotation and 76 mm x 52 mm cross travel[6] |
| Standard condenser | — | NA 1.40 achromat/aplanatic condenser[6] |
| Light source | — | 12V 100W halogen bulb[6] |
| Power transformer | — | Built into the base and adjustable from 0 to 12 volts[6] |
| Photomicrographic camera system | — | PM-10AD universal, fully modular multiformat camera system with automatic controls[6] |
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