Comparison ledger
KLA .204 PSL Wafer, Onto Innovation Atlas 1000-00493 Metrology, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Atlas 1000-00493 MetrologyOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Onto Innovation Atlas 1000-00493 Metrology |
| Specifications | ||
| Configuration | NIST Traceable[1] | Lamp / Wavelength:[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Robot | — | Kawasaki Linear Track Type[4] |
| Loader | — | Dual TDK E3 FOUP[4] |
| SR | — | vis Halogen (400-780 nm)[4] |
| SE | — | Xe 210-1000nm (small spot)[4] |
| Operation System | — | Windows XP[4] |
| Stage | — | X,Y,Z,T[4] |
| Manufacturer | — | Onto Innovation[5] |
| Model | — | Atlas 1000-00493 Metrology[4] |
| Wafer sizes | — | 8-inch, 12-inch[4] |
| Lamp / wavelength, SR | — | vis Halogen (400-780 nm)[4] |
| Lamp / wavelength, SE | — | Xe 210-1000nm (small spot)[4] |
| Spot size, SR 15X/10X | — | can measure 30x30um / 4x: 50 x 50um pad[4] |
| Spot size, SE UV/vis (Xe) | — | can measure 50um x 50 um pad[4] |
| Category | — | Metrology & Inspection[5] |
| Spot size, SR 4x | — | can measure 50 x 50um pad[4] |
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