Comparison ledger
KLA .204 PSL Wafer, Onto Innovation MetaPulse 200 Film Metrology, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MetaPulse 200 Film MetrologyOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Onto Innovation MetaPulse 200 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Phase | — | 1 Phase[4] |
| Voltage | — | 220 vac[5] |
| Manufacturer | — | Onto Innovation[5] |
| Model | — | MetaPulse 200 Film Metrology[4] |
| Wafer size | — | 8 inch[4] |
| Power | — | 50/60 Hz[5] |
| Wafer handling | — | robot[5] |
| Optics | — | working laser[5] |
| Included | — | working laser; robot[4] |
| Excluded | — | chiller not included[4] |
| Vintage | — | 2002[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →