Comparison ledger
KLA .204 PSL Wafer, Onto Innovation NSX 320, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 320Onto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Onto Innovation NSX |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[2] | Single Phase[5] |
| Wafer Size | 8 inch[3] | — |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[2] | — |
| NIST Traceable | Yes[3] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[3] | — |
| Full Load Current | — | 40 A[5] |
| Make | — | ONTO / Rudolph / August[5] |
| Model | — | NSX 320[5] |
| System type | — | Inspection System[5] |
| Electrical | — | Single phase, 200-240 V, 50/60 Hz[5] |
| Vintage | — | 2013[5] |
| Series | — | NSX Metrology Series[1] |
| Equipment type | — | Inspection System[5] |
| Power | — | Single Phase - 200-240 V - 50/60 Hz[5] |
| Capability | — | Macro defect detection (residue, adhesive, post-saw)[1] |
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