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Comparison ledger

.204 PSL WaferversusScientific FEI Helios 1200 FIB

KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Helios 1200 FIB, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferThermo Fisher Scientific FEI Helios 1200 FIB
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[2]—
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
Equipment type—Focused ion beam (FIB) tool[4]
Model—Helios 1200[4]
Manufacturer (Make)—Thermo Fisher Scientific / FEI[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing