Comparison ledger
KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Strata 400 S STEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Strata 400 S STEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Thermo Fisher Scientific FEI Strata 400 S |
| Specifications | ||
| Configuration | NIST Traceable[1] | Type FP 2045/31[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| UHV Assy | — | 51-1236-207 +24V = 50W[4] |
| Resolution at 5.9 keV | — | 127eV[4] |
| Instrument type | — | Scanning transmission electron microscope[5] |
| Category | — | Metrology & Inspection[5] |
| Power / electrical | — | UHV Assy 51-1236-207 +24V = 50W[5] |
| Optics / imaging | — | Resolution at 5.9 keV: 127eV[5] |
| Configuration / type | — | Type FP 2045/31[5] |
| Included spectroscopy | — | Oxford 51-XMX 1134 X-Max Energy Dispersive X-ray Spectroscopy[5] |
| Type | — | FP 2045/31[5] |
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