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Comparison ledger

.204 PSL WaferversusNT 3300 Optical

KLA .204 PSL Wafer, Veeco NT 3300 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLAVeeco
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferVeeco NT 3300 Optical
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[2]8 inch[6]
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
Type—Optical Profilometer / Optical 3D Profiling System[4]
Make—Veeco / Wyko[4]
Model—NT 3300[4]
Measurement Modes—VSI (Vertical Scanning Interferometry) and PSI (Phase Shifting Interferometry)[5]
Software—Vision 3.43[5]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]manualslib.commanualslib.com
  6. [6]Equipment inventory listing