Waferpedia

Comparison ledger

.204 PSL WaferversusYTV F 1 AOI

KLA .204 PSL Wafer, YES YTV F 1 AOI, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLAYES
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferYES YTV F 1 AOI
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[2]—
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
Category—Metrology & Inspection[4]
Machine type—Automated Optical Inspection (AOI)[5]
Camera type—Top down viewing camera[6]
Max board size—22" x 20"[6]
Resolution—1280 x 1025[6]
Electrical input—120VAC 1500W Max[6]
Serial number—V309071067[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]Equipment inventory listing
  6. [6]ibesmt.comibesmt.com