Comparison ledger
KLA .204 PSL Wafer, Zeiss Sigma HDVP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Sigma HDVPZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Zeiss Sigma |
| Specifications | ||
| Configuration | NIST Traceable[1] | Electron source[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Acceleration voltage | — | 0.02 kV - 30 kV[4] |
| Magnification range | — | 10-1.000.000x[4] |
| Specimen chamber | — | 358 mm[4] |
| Stage axes | — | 5 axes (X:30 mm, Y:130 mm, Z:50 mm, T:-3°-70°, R:360°)[4] |
| Detectors | — | HD AsB, CL, STEM, SCD[4] |
| Pumps | — | Turbomolecular pump, Ion getter pump, Ultimate high vacuum pump[4] |
| Control PC | — | TFT Monitor 19", Windows 7, 4 GB RAM, HDD[4] |
| Display | — | TFT Monitor, 19“[4] |
| Operating system | — | Windows 7[4] |
| RAM | — | 4 GB[4] |
| User interface | — | Keyboard, Mouse[4] |
| OEM | — | Zeiss[4] |
| Model | — | Sigma HDVP[4] |
| Equipment type | — | SEM (Scanning Electron Microscope)[4] |
| Stage movements | — | 5 axes: X 30 mm, Y 130 mm, Z 50 mm, T -3° to 70°, R 360°[4] |
| Control PC display | — | TFT Monitor, 19"[4] |
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