Comparison ledger
KLA 2131, KLA 2132 Brightfield, KLA 2133 Brightfield, KLA 2135 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2131KLA | |||
|---|---|---|---|---|
| OEM | KLA | KLA | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — | Wafer Transfer | — |
| Process node | — | — | — | — |
| Introduced | — | — | — | — |
| Production run | 1994– | — | — | — |
| Lifecycle | — | — | — | — |
| Lifecycle milestones | — | — | — | — |
| Control system | — | — | — | — |
| Generation | — | — | — | — |
| Family | KLA 21xx | KLA 21xx | KLA 21xx | KLA 21xx |
| Specifications | ||||
| Configuration | HDD[1] | Main body only[5] | 2 x 25 Auto Load[6] | Refurbished[8] |
| Manufacturer | KLA[2] | — | — | — |
| Category | Metrology & Inspection[2] | — | Metrology & Inspection[7] | — |
| Type | inspection system[2] | — | — | — |
| Wafer sizes | 6 inch[1] | 6, 8 inch[5] | — | — |
| OEM | — | KLA[5] | KLA[6] | KLA[11] |
| Model | — | 2132[5] | 2133 Brightfield[6] | 2135[11] |
| Vintage | — | 1995[5] | — | 1996[9] |
| Wafer size | — | — | Wafer Transfer[6] | — |
| Process Vac | — | — | 23 InHg[6] | — |
| Inlet Power | — | — | 3 line of 208 Vac 20 Amp[6] | — |
| CDA | — | — | 100 PSI[6] | — |
| Exhaust for Cooling | — | — | Blower[6] | — |
| Wafer handling | — | — | Cassette Transfer[7] | — |
| Voltage | — | — | — | 208 Vac[9] |
| Phase | — | — | — | 3 Phase[10] |
| Frequency | — | — | — | 50/60 Hz[9] |
| Current | — | — | — | 30 amps[9] |
| Input Voltage | — | — | — | 208 Vac[9] |
| Tool type | — | — | — | Brightfield inspection[11] |
| Electrical | — | — | — | 208 Vac, 50/60 Hz, 30 amps[9] |
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