Comparison ledger
KLA 2133 Brightfield, KLA Puma 9130 Darkfield Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer Transfer | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA Puma 9130 |
| Specifications | ||
| Configuration | 2 x 25 Auto Load[1] | Refurbished[3] |
| Wafer size | Wafer Transfer[1] | — |
| Process Vac | 23 InHg[1] | — |
| Inlet Power | 3 line of 208 Vac 20 Amp[1] | — |
| CDA | 100 PSI[1] | — |
| Exhaust for Cooling | Blower[1] | — |
| OEM | KLA[1] | — |
| Model | 2133 Brightfield[1] | — |
| Category | Metrology & Inspection[2] | — |
| Wafer handling | Cassette Transfer[2] | — |
| Tool type | — | Darkfield defect inspection system[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →