Waferpedia

Comparison ledger

300901versus.498 PSL Wafer

KLA 300901, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 300901KLA .498 PSL Wafer
Specifications
MakeKLA / Leica[1]—
Model300901[1]—
Asset #79355[1]—
CategoryMetrology & Inspection[2]Metrology & Inspection[3]
Configuration—NIST Traceable[3]
NIST traceability—Yes[3]
OEM—KLA[3]
Traceability—Yes[3]
Description—Particle-sizing calibration standard[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com