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KLA

300901

Metrology & InspectionKLA 300901 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

300901 — Inventory photo
Fig. 01300901Inventory photo[1]

What it is

The KLA / Leica 300901 is a microscope. The KLA / Leica 300901 is categorized under metrology and inspection.[1][2][3]

How it works

General reference — not yet source-verified

Inspection microscopes form an enlarged optical image of a sample so an operator can examine feature appearance and surface condition. Inspection microscopes in fab use commonly combine illumination, objective optics, focus control, and a sample stage so regions of interest can be brought into view and evaluated directly.

Where it fits in the process flow

General reference — not yet source-verified

Metrology and inspection microscopes are used across the process flow wherever visual verification is needed after a fabrication, patterning, deposition, etch, cleaning, assembly, or rework step. Microscopes in this class are commonly used near process tools, engineering benches, analytical areas, and quality functions to confirm whether material or pattern conditions match expectations before the next operation proceeds.

Applications

General reference — not yet source-verified

Semiconductor inspection microscopes are applied to defect review, operator checks, process development, and general visual disposition work. Semiconductor inspection microscopes are used to examine patterned and unpatterned surfaces for scratches, particles, staining, cracking, edge issues, overlay appearance, and other observable anomalies.

What do the numbers mean?

Configuration & options4

Make
KLA / Leica[1]
Accurate?
Model
300901[1]
Accurate?
Asset #
79355[1]
Accurate?
Category
Metrology & Inspection[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the KLA / Leica 300901?

The KLA / Leica 300901 is a microscope.[1][2]

What equipment category is assigned to the 300901?

The 300901 is assigned to the metrology and inspection category.[3]

Not publicly documented

The following facts about the 300901 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 300901 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 300901 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 300901 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 300901 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 300901 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 16, 2026.

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