Comparison ledger
KLA .496 PSL Wafer, KLA OP 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | OP 2600KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1994 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA OP 2600 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Refurbished[3] |
| Wafer size | 8 inch[1] | 8 inch[5] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| P/N | — | 5A-80-00-0007-10[3] |
| Make | — | KLA / Therma-wave[3] |
| Model | — | OP 2600[4] |
| Tool name | — | Thermawave OP2600[5] |
| Vintage | — | 1994-12[5] |
| Tool condition | — | Refurbished[5] |
| Description | — | Thin film measurement[6] |
| Cassette loader stations | — | Two[5] |
| Optical source | — | 675 nm thermoelectrically cooled diode laser[5] |
| Spectrometry light source | — | 450 to 840 nm tungsten halogen lamp[5] |
| Measurement modes | — | Beam Profile Reflectometry (BPR), Beam Profile Ellipsometry (BPE), and spectrometry[5] |
| Manufacturer | — | KLA / Therma-wave[3] |
| Wafer compatibility | — | 4 to 8 inches[5] |
| Version / wafer size | — | 200 mm[4] |
| Maker | — | THERMAWAVE[5] |
| Measurement methods | — | Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE)[5] |
| Light source | — | 675 nm thermoelectrically cooled diode laser; spectrometry mode uses a visible 450 to 840 nm tungsten halogen lamp[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →