KLA

OP 2600

Metrology & Inspection KLA OP 2600 family

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The KLA OP 2600 is a Therma-Wave Opti-Probe 2600. The KLA OP 2600 is used for film thickness measurement. The KLA OP 2600 is specified for 8-inch wafers.^[1]^[2]

KLAOP 2600

No photo available yet

What it is

The KLA OP 2600 is a thin film measurement system for semiconductor metrology.^[4]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Missing the wafer loading port

What do the numbers mean?

Power & electrical2

Optical source: 675 nm thermoelectrically cooled diode laser^[1]
Light source: 675 nm thermoelectrically cooled diode laser; spectrometry mode uses a visible 450 to 840 nm tungsten halogen lamp^[1]

Wafer handling6

Open Cassette^[3]
Wafer size: 8 inch^[1]
Cassette loader stations: Two^[1]
Wafer compatibility: 4 to 8 inches^[1]
Version / wafer size: 200 mm^[4]
Wafer size: 8"^[1]

Optics & imaging1

Spectrometry light source: 450 to 840 nm tungsten halogen lamp^[1]

Configuration & options14

P/N: 5A-80-00-0007-10^[3]; Refurbished^[3]
Make: KLA / Therma-wave^[3]
Model: OP 2600^[4]
Tool name: Thermawave OP2600^[1]
Vintage: 1994-12^[1]
Tool condition: Refurbished^[1]
Description: Thin film measurement^[2]2 sources
Measurement modes: Beam Profile Reflectometry (BPR), Beam Profile Ellipsometry (BPE), and spectrometry^[1]
Manufacturer: KLA / Therma-wave^[3]
Measurement modes: Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE)^[1]
Manufacturer: KLA^[4]
Maker: THERMAWAVE^[1]
Measurement methods: Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE)^[1]

Vintage & configurations

1994-12Vintage^[1]
Vintage stated as 1994-12.

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Optical source675 nm thermoelectrically cooled diode laser^[1]
Light source675 nm thermoelectrically cooled diode laser; spectrometry mode uses a visible 450 to 840 nm tungsten halogen lamp^[1]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

KLA / Therma-wave OP 2600 Service WorkIn Productionsource^[5]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of measurement does the KLA OP 2600 perform?

The KLA OP 2600 performs thin-film measurement.^[4]^[2]

Not publicly documented

The following facts about the OP 2600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the OP 2600 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the OP 2600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the OP 2600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the OP 2600 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
The operating principle of the OP 2600 is not documented in this record.
Answerable by: an equipment physicist or OEM application engineer