Comparison ledger
KLA .496 PSL Wafer, Onto Innovation WV 320, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WV 320Onto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Onto Innovation WV 320 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 12"[3] |
| Wafer size | 8 inch[1] | 12"[3] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| OEM | — | ONTO / Rudolph[4] |
| Model | — | WV 320[5] |
| Equipment type | — | Inspection System[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →