Waferpedia

Onto Innovation

WV 320

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Onto InnovationWV 320
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Where it fits in the process flow

The WV 320 is used in semiconductor manufacturing equipment contexts.[2]

Applications

The WV 320 can be configured for 12-inch wafer size.[2][1]

What do the numbers mean?

Wafer handling1

Wafer size
12"[1]
Accurate?

Configuration & options4

12"[1]
Accurate?
OEM
ONTO / Rudolph[2]
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Model
WV 320[3]
Accurate?
Equipment type
Inspection System[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Onto Innovation WV 320?

The Onto Innovation WV 320 is an inspection system.[2][3][1]

Which equipment category includes the WV 320?

The WV 320 is in the metrology and inspection category.[2]

Not publicly documented

The following facts about the WV 320 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WV 320 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WV 320 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WV 320 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WV 320 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WV 320 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
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Last updated Oct 20, 2026.

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