Comparison ledger
KLA .496 PSL Wafer, Sonix UHR 2001, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UHR 2001Sonix | |
|---|---|---|
| OEM | KLA | Sonix |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Sonix UHR 2001 |
| Specifications | ||
| Configuration | NIST Traceable[1] | CSAM[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Type | — | Scanning Acoustic Microscope (SAM)[5] |
| Known issue | — | Water circulation pump needs to be replaced (not working)[4] |
| Tool type | — | Scanning Acoustic Microscope (SAM)[5] |
| Model | — | UHR 2001[4] |
| Condition note | — | Water circulation pump needs to be replaced (not working)[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →