Sonix
UHR 2001
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedScanning acoustic microscopes are metrology and inspection tools that use focused ultrasound to examine internal structure without cutting the sample open. Scanning acoustic microscopes are used to reveal hidden interfaces and structural defects inside packaged devices and related assemblies.
How it works
General reference — not yet source-verifiedScanning acoustic microscopes generally transmit ultrasonic energy into a sample through a liquid coupling path and analyze the returning signal to form an image of subsurface features. Scanning acoustic microscopes generally localize defects by changes in acoustic reflection and transmission at internal boundaries.
Where it fits in the process flow
General reference — not yet source-verifiedScanning acoustic microscopes are typically used after assembly or bonding operations when subsurface integrity must be checked without destroying the part. Scanning acoustic microscopes are commonly used in failure analysis, qualification, and production inspection workflows rather than as patterning or material removal tools.
Applications
Sonix scanning acoustic microscopes are used to diagnose device failures, monitor production sampling, and qualify new package designs.[3]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Water circulation pump needs to be replaced (not working)
What do the numbers mean?
Vacuum & pumping3
- Water circulation pump needs to be replaced (not working)[2]
Configuration & options4
- CSAM[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Sonix UHR 2001 used for?
Sonix scanning acoustic microscopes are used to diagnose device failures, monitor production sampling, and qualify new package designs.[3]
Not publicly documented
The following facts about the UHR 2001 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UHR 2001 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the UHR 2001 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UHR 2001 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the UHR 2001 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the UHR 2001 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.comwaferpedia.com
- [2]inventory listing
- [3]web.archive.org — sonix.com (Oct 14, 2002)web.archive.org
Last updated Oct 20, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
