Comparison ledger
KLA 5100 Overlay Measurement, KLA P-15, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-15KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 5100 | KLA P-15 |
| Specifications | ||
| OS | VMS[1] | — |
| Configuration | Windows NT / VAX software[1] | — |
| Sample table | — | 200 mm sample table with vacuum[2] |
| Measurement range | — | Measures steps from 100 Å to 300 µm[2] |
| Maximum sample thickness | — | 20 mm[2] |
| Minimum sample length | — | 25 mm[2] |
| Tool type | — | Profilometer[3] |
| Measurement capabilities | — | Measures roughness, waviness, step height, and other surface characteristics[4] |
| Wafer capability | — | Up to 8"/200mm wafer capable[4] |
| Control platform | — | Windows NT[4] |
| Software version | — | Profiler v6.41[4] |
| Automation | — | Computer controlled; automatic measurement capability[4] |
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