Waferpedia

Comparison ledger

P 10versusNT 3300

KLA P 10, Veeco NT 3300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: Metrology & Inspection, null[1]
Side-by-side comparison of selected equipment models
Attribute
P 10KLA
NT 3300Veeco
OEMKLAVeeco
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA PVeeco NT 3300
Cited variants—
  • Wyko DMEMS NT3300[2]
Specifications
Phase1 Phase[1]—
Frequency50 Hz[1]—
Configuration2A[1]200 mm stage[3]
Voltage220V[1]—
TypeProfilometer[1]Optical Profiler[2]
Current2A[1]—
ManufacturerKLA[1]—
ModelP 10[1]NT 3300[3]
Equipment typeProfilometer[1]Profilometer[3]
Power1 phase, 50 Hz, 2A, 220V[1]—
Objectives—10x, 50x[3]
Stage Size—200 mm[3]
Turret Barrels—Full complement of A, 0.5x, 1x, 2x[3]
Make—Veeco / Wyko[3]
Stage—200 mm stage[3]
Turret barrels—A, 0.5x, 1X, 2X barrels[3]
Documentation—Manuals & software available[3]
Barrels—A, 0.5x, 1X, 2X[3]
Measurement Type—Optical Profiler[5]
Stage size—200 mm stage[3]
Included documentation / software—Manuals & software available[3]
Additional barrels—A, 0.5x, 1X, 2X[3]
Measurement use—Optical profiler used for measuring arithmetic average surface roughness[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]nanolab.ucla.edunanolab.ucla.edu
  6. [6]patents.google.compatents.google.com