Comparison ledger
KLA P-2, KLA Puma 9120 Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-2KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-2 | KLA Puma 9120 |
| Specifications | ||
| Model | P-2[1] | Puma 9120[4] |
| OEM | KLA Tencor[1] | KLA[4] |
| Equipment type | Profilometer[1] | — |
| Sample table | 200 mm sample table with vacuum[2] | — |
| Measurement range | Measures steps from 100 Å to 300 µm[2] | — |
| Maximum sample thickness | 20 mm[2] | — |
| Minimum sample length | 25 mm[2] | — |
| Feature | 3D scan option[2] | — |
| Wafer size | 200mm[3] | — |
| 3D scan option | Yes[2] | — |
| Configuration | — | User Interface Software Version 9.3.309.2.8[4] |
| User Interface Software Version | — | 9.3.309.2.8[5] |
| Operating System | — | Windows 2000[5] |
| Load Port Quantity | — | 2[5] |
| Wavelength Illumination | — | 370~720 nm[5] |
| Wavelength Band | — | Visible, UV[5] |
| Pixel Sizes | — | 0.16μm, 0.20μm, 0.25μm, 0.39μm, 0.62μm[5] |
| Array Defect Capture Rate | — | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[5] |
| Array False Defect Rate | — | ≤1.5% (all sizes)[5] |
| Random Defect Capture Rate | — | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[5] |
| Random False Defect Rate | — | ≤1.5% (all sizes)[5] |
| Repeatability | — | ≥90% (20 consecutive run on the same DSW wafer)[5] |
| Number of Inspection Pixel Models | — | 3[6] |
| Pixel Sizes (sLXX) Installed or Available | — | sL5, sL8, sL20[6] |
| Cameras | — | 2[6] |
| Loader Type | — | Dual open cassette loader[6] |
| Software Options: Array Mode Algorithm | — | Yes[6] |
| Software Options: Sizing | — | Yes[6] |
| Software Options: 9.1 Simulator | — | Yes[6] |
| Software Options: RICO Capable | — | No[6] |
| Wafer Sizes | — | 200 mm (8 in), 300 mm (12 in)[6] |
| Category | — | Metrology & Inspection[5] |
| Number of Cameras | — | 2[6] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →