Waferpedia

Comparison ledger

P-2versusViper 2401 Defect

KLA P-2, KLA Viper 2401 Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
P-2KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA P-2KLA Viper
Specifications
ModelP-2[1]Viper 2401 Defect[4]
OEMKLA Tencor[1]KLA[4]
Equipment typeProfilometer[1]—
Sample table200 mm sample table with vacuum[2]—
Measurement rangeMeasures steps from 100 Å to 300 µm[2]—
Maximum sample thickness20 mm[2]—
Minimum sample length25 mm[2]—
Feature3D scan option[2]—
Wafer size200mm[3]—
3D scan optionYes[2]—
Phase—1 Phase[4]
Configuration—50/60 Hz[4]
Supply Voltage—100-200, 200-240 V[4]
Interrupt Capacity—10,000 Amps[4]
Category—Metrology & Inspection[5]
Frequency—50/60 Hz[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]nanofab.ece.cmu.edunanofab.ece.cmu.edu
  2. [2]nanofab.ece.cmu.edunanofab.ece.cmu.edu
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com