Comparison ledger
KLA Surfscan SP 1 DLS, PR Hoffman 108T, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 108TPR Hoffman | |
|---|---|---|
| OEM | KLA | PR Hoffman |
| Category | CMP | CMP |
| Wafer size | For Wafer Centering Device | up to 12 in wafers |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Surfscan | PR Hoffman 108T |
| Specifications | ||
| Configuration | Upgraded/New[1] | — |
| Wafer size | For Wafer Centering Device[1] | up to 12 in wafers[6] |
| Defect Sensitivity (Polished Bare Silicon) | 0.050 µm[2] | — |
| Laser Source | Argon Ion Laser (488 nm)[2] | — |
| Wafer Size Support | 200 mm and 300 mm[2] | — |
| Enhanced Rough Film Sensitivity | Yes[2] | — |
| Real Time Defect Classification (RTDC) | Yes[2] | — |
| Defect Map and Histogram with Zoom | Yes[2] | — |
| Map to Map | Yes[2] | — |
| Operator Interface | Yes[2] | — |
| Blower Unit | Yes[2] | — |
| OEM | KLA-Tencor[2] | — |
| Model | SP1 DLS[3] | — |
| Wafer Size | 200/300mm[2] | — |
| Defect Sensitivity | 0.050um on polished bare silicon[2] | — |
| Surface Type | Unpatterned[2] | — |
| Key Feature | Enhanced Rough Film Sensitivity[2] | — |
| Optional Handler | 300mm Single FOUP/FIMS Handler[2] | — |
| carrier type listing | — | 108T 9B - S/F / Lapmaster LSP-9 / etc.[4] |
| machine class | — | for double-sided planetary lapping & polishing machines[4] |
| wafer sizes stated on insert-carrier page | — | 3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[4] |
| maximum carrier diameter stated on insert-carrier page | — | up to 33 in diameter[4] |
| maximum carrier diameter stated on lapping-carrier page | — | up to 48 in diameter[5] |
| Model designation | — | 108T[6] |
| Category | — | CMP[6] |
| Carrier type | — | insert/lapping carrier[6] |
| Machine type | — | double-sided planetary lapping and polishing machines[6] |
| Compatible machine examples | — | 9B / S-F / Lapmaster LSP-9 / etc.[6] |