Comparison ledger
Lam Research 716 069688 809 ESC Assy, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 716 069688 809 ESC AssyLam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research 716 069688 809 ESC Assy | Tegal 1512e |
| Cited variants | — | |
| Specifications | ||
| Configuration | Inner, SI W/ Stud, Socket[1] | — |
| OEM | Lam[1] | — |
| Model | 716 069688 809[1] | — |
| Product type | ESC Assy[1] | — |
| Variant detail | Inner, SI W/ Stud, Socket[1] | — |
| Manufacturer | Lam[1] | — |
| Assembly designation | ESC Assy[1] | — |
| Description (listing A) | Inner, SI W/ Stud, Socket[1] | — |
| Description (listing B) | Inner, SI[2] | — |
| Product description | ESC Assy Inner, SI[2] | — |
| Asset # | 147371[2] | — |
| Last Confirm Date | December 10, 2025[2] | — |
| Tool type | — | Industrial RIE plasma etcher system[3] |
| Stated configuration | — | With modules assembly for CI-4222[3] |
| Category | — | Etch[4] |
| Condition | — | Used[5] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →