Comparison ledger
Lam Research Rainbow 4420 Polysilicon, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Rainbow 4420 PolysiliconLam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | Cassette to Cassette Single Wafer Etcher | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Rainbow 4420 | Tegal 1512e |
| Specifications | ||
| Wafer size | Cassette to Cassette Single Wafer Etcher[1] | — |
| Configuration | ESC[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →