Waferpedia

Lam Research

Rainbow 4420 Polysilicon

Rainbow 4420 Polysilicon — Inventory photo
Fig. 01Rainbow 4420 PolysiliconInventory photo[1]

Wafer size

Cassette to Cassette Single Wafer Etcher

Gas delivery

Orbital gas panel[1]

What is it?

The Lam Rainbow 4420 Polysilicon Etcher is a cassette-to-cassette single wafer etcher for 6-inch wafers.

What do the numbers mean?

Wafer handling1

Wafer size
Cassette to Cassette Single Wafer Etcher[1]
Accurate?

Gas & chemistry1

Orbital gas panel[1]
Accurate?

Configuration & options4

ESC[1]
Accurate?
Classic[1]
Accurate?
Particle reduction[1]
Accurate?
TCU 2080 Chiller[1]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationOrbital gas panel[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Rainbow 4420 Polysilicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4420 Polysilicon are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4420 Polysilicon are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Rainbow 4420 Polysilicon are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Rainbow 4420 Polysilicon are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Rainbow 4420 Polysilicon is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →