Comparison ledger
Lam Research Rainbow 4520 Dielectric, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Rainbow 4520 DielectricLam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Rainbow 4520 Dielectric | Tegal 1512e |
| Specifications | ||
| OEM | Lam Research[1] | — |
| Model | Rainbow 4520 Dielectric[1] | — |
| Category | Etch[2] | Etch[5] |
| Wafer size | 6 inch[1] | — |
| Process type | single wafer etching[3] | — |
| Tool type | single wafer, vacuum load-locked low pressure oxide etch system[3] | Industrial RIE plasma etcher system[4] |
| Stated configuration | — | With modules assembly for CI-4222[4] |
| Condition | — | Used[6] |
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