Comparison ledger
Lam Research SEZ 102, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEZ 102Lam Research | 1000FPYES |
|---|---|---|
| OEM | Lam Research | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research SEZ | YES 1000FP |
| Specifications | ||
| Voltage | 208 Vac[1] | — |
| Phase | 3 Phase[1] | — |
| Configuration | 50 A[1] | — |
| Manufacturer | Lam Research[2] | — |
| Model | 102[1] | Glen/YES 1000FP[3] |
| Wafer Size | 6 inch[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Current | 50 A[1] | — |
| System type | — | Plasma cleaning system[3] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[3] |
| Designed use | — | Designed to accept a range of shelf sizes[3] |
| Application focus | — | Changing needs of the flat panel industry[3] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →