Comparison ledger
Lam Research TCP 9400 DFM Poly, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TCP 9400 DFM PolyLam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research TCP 9400 DFM Poly | Tegal 1512e |
| Specifications | ||
| Phase | 50/60 Hz, 3 Phase, 4 Wire[1] | — |
| Software | A4.0-37VM[1] | — |
| PM2 Gas box | (10) Brooks GF125[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
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