Waferpedia

Comparison ledger

120 Continuousversus6 DE-DC 1

Lapmaster 120 Continuous, Strasbaugh 6 DE-DC 1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
6 DE-DC 1Strasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh 6 DE-DC 1
Specifications
Configuration—One Spindle[1]
Manufacturer—Strasbaugh[1]
Model—6 DE-DC 1[1]
Tool type—Polisher[1]
Spindles—One spindle[1]
Capacity—12-inch capacity[1]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing