Waferpedia

Comparison ledger

120 Continuousversus6 DT

Lapmaster 120 Continuous, Strasbaugh 6 DT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
6 DTStrasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh 6 DT
Specifications
Phase—3 Phase[1]
Configuration—480 Voltage[1]
Voltage—480 V[1]
Manufacturer—Strasbaugh[1]
Model—6 DT[1]
Category—CMP[2]
Type—polisher[2]
Electrical power—3-phase 480V[2]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com