Waferpedia

Comparison ledger

120 ContinuousversusSpindle

Lapmaster 120 Continuous, Strasbaugh Spindle, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
SpindleStrasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh Spindle
Specifications
Phase—3 Phase[1]
Voltage—250 V[1]
Configuration—20A[1]
Category—CMP[2]
Current—20A[1]
Equipment type—Spindle polisher[1]
Power—3 Phase[1]
Work capacity—1/2" - 60" diameter work capacity[3]
Configurations—Single, double, four and six-station configurations[3]
Station controls—Individual station controls[3]
Drive type—Powerful DC drives[3]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org