Waferpedia

Comparison ledger

51848 Boxversus0332 F 9453 302 Diffusion

Lindberg 51848 Box, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
51848 BoxLindberg
OEMLindbergVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLindberg 51848 BoxVarian 0332 F 9453 302 Diffusion
Specifications
Temperature890 °C Max[1]—
ConfigurationAnalog temperature setting (vs. digital)[1]—
Inside dims4" x 8"[1]—
Maximum temperature890 °C[2]—
Temperature settingAnalog[1]—
Inside dimensions4" x 8"[3]—
Asset Number—142841[4]
Last Confirm Date—October 14, 2025[5]
Make—Varian[4]
Model—0332 F 9453 302[4]
Category—Thermal / Diffusion[6]
Tool type—diffusion pump[6]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]fab-spares.comfab-spares.com
  6. [6]waferpedia.comwaferpedia.com