Waferpedia

Comparison ledger

1 DP 41versus6 DF DC 1

Logitech 1 DP 41, Strasbaugh 6 DF DC 1, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
6 DF DC 1Strasbaugh
OEMLogitechStrasbaugh
CategoryCMPCMP
Wafer size—10" Diameter Wafer Carrier:
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech 1 DP 41Strasbaugh 6 DF DC 1
Specifications
Phase3 Phase[1]—
Configuration50/60 Hz[1]Refurbished[2]
Voltage480 V[1]230 V, Single Phase, 60 Hz[2]
MakeLogitech[1]—
Model1 DP 41[1]6 DF DC 1[2]
Frequency50/60 Hz[1]—
Current12 amps[1]—
Full Load—15 A[2]
Motor—8.0 A[2]
OEM—Strasbaugh[2]
Category—CMP[2]
Type—Chemical Mechanical Polisher[2]
Capacity—24-inch capacity overarm spindle polisher[2]
Process—multi process[2]
Variable speed—0-100 RPM (DC) electronic drives[2]
Work spindle motor—1.5 HP[2]
Oscillator motor—1 HP[2]
Digital tachometer—included[2]
Digital timer—included[2]
Load meter—included[2]
Alarm system—included[2]
Slurry pan—stainless steel square slurry pan with sloped drain[2]
Slurry manifold—adjustable Snaploc line with flow valve[2]
Polishing table—22-inch diameter, 1-inch thick, precision lapped flat to 0.0001"[2]
Wafer carrier—10-inch diameter wafer carrier, stainless steel, W-bearing, nylon quill insert, precision lapped flat to 0.0001"[2]
Spindle riser—4-inch spindle riser; 8 thread, 1"[2]
Spindle to tooling adapter hub—stainless steel, 8 thread, 1"[2]
Spindle to tooling adapter hub material—aluminum[2]
Drive specification—2 HP, 180 VDC, 150 RPM[2]
High downforce polishing—included[2]
Wafer size—10" Diameter Wafer Carrier:[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com