Comparison ledger
Mattson SHS 2800 RTA, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SHS 2800 RTAMattson | |
|---|---|---|
| OEM | Mattson | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Mattson SHS 2800 RTA | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Configuration | Front End[1] | — |
| Process | Oxid (BPSG + RTP)[1] | — |
| Voltage | 380 V, 63.0 A, 50/60 Hz, 3 Phase[1] | — |
| Make | Mattson[1] | Varian[4] |
| Model | SHS 2800[3] | 0332 F 9453 302[4] |
| Category | Thermal / Diffusion[3] | Thermal / Diffusion[6] |
| Type | rapid thermal anneal system[3] | — |
| Temperature measurement | Ripple Pyrometer[1] | — |
| Cooling | Jet Venturi System[1] | — |
| Electrical | 380 V, 63.0 A, 50/60 Hz, 3 Phase[1] | — |
| Vintage | 2000[1] | — |
| Manufacturer | Mattson[3] | — |
| Control configuration | Front End; tool-controller configurations[3] | — |
| Control software | Win7 (Updated 2018) / Win7 (Updated 2019)[3] | — |
| Asset Number | — | 142841[4] |
| Last Confirm Date | — | October 14, 2025[5] |
| Tool type | — | diffusion pump[6] |
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