Comparison ledger
Nikon NSR 1505 G 6 E, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSR 1505 G 6 ENikon | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | Nikon | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1988 Introduction | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon NSR | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Configuration | 0.65um G-line[1] | — |
| Manufacturer | Nikon[1] | — |
| Model | NSR 1505 G 6 E[1] | — |
| Wafer size | 6 inch[1] | — |
| Process/generation | 0.65 um G-line[1] | — |
| Tool type | Stepper[1] | — |
| Introduction year | 1988[2] | — |
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