Comparison ledger
Nikon NSR 2205 i 8 A i-Line, OAI 806, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 806OAI | |
|---|---|---|
| OEM | Nikon | OAI |
| Category | Lithography | Lithography |
| Wafer size | 6" | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon NSR 2205 | OAI 806 |
| Specifications | ||
| Resolution | 0.5µm[1] | — |
| Computer Type | PDP11[2] | — |
| Rentical Size | 5 Inch[2] | — |
| Field Sizes | 15 / 17.5 / 20mm[2] | — |
| Wafer Size | 6 Inch Flat[2] | — |
| Reticle Libraries | 1[2] | — |
| Wafer Loader | Type 1[2] | — |
| Wafer size | Wafer Loader Pre-alignment 2[2] | — |
| Configuration | Barcode Reader[2] | — |
| Wafer Loader Indexers | 2[2] | — |
| Autofocus | Single Point[2] | — |
| Chuck Type | Ceramic Ring Chuck[2] | — |
| Water Stage | Ballscrew[2] | — |
| MCS2 Version | 2.4B[2] | — |
| OEM | Nikon[2] | — |
| Model | NSR 2205 i 8 A i-Line[2] | OAI 806 Mask Aligner[3] |
| Category | Lithography[1] | — |
| Retical size | 5 Inch[2] | — |
| Wafer size flat | 6 Inch Flat[2] | — |
| Wafer loader pre-alignment | 2[2] | — |
| Barcode reader | Yes[2] | — |
| FIA | Yes[2] | — |
| LSA | Yes[2] | — |
| LIA | Yes[2] | — |
| Levelling | Yes[2] | — |
| Vintage | 1991[2] | — |
| Patterning substrate size | — | up to 6 inches[3] |
| Contact modes | — | soft, hard, and proximity contact modes[3] |
| Alignment accuracy | — | submicron[3] |
| UV source | — | collimated UV light source[3] |
| Workholding | — | vacuum chuck[3] |
| Optics | — | integrated microscope optics[3] |
| Stage | — | motorized stage[3] |
| Optional capability | — | backside alignment[3] |
| Substrate size | — | up to 6 inches[3] |
| Light source | — | collimated UV[3] |
| Backside alignment | — | optional[3] |
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