Comparison ledger
Nikon VMZ R 3020, Nikon VMZ R 3020 CNC Video Measuring, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VMZ R 3020Nikon | |
|---|---|---|
| OEM | Nikon | Nikon |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon VMZ R 3020 | Nikon VMZ R 3020 |
| Cited variants | — | |
| Specifications | ||
| Configuration | Nexiv Microscope[2] | Measurement Accuracy:[5] |
| Manufacturer | Nikon[2] | — |
| Model | VMZ R 3020[2] | — |
| Wafer sizes | 8, 12 inch[2] | — |
| Tool type | automated measuring system[3] | — |
| Stroke | 300 x 200 x 200 mm[3] | — |
| Stroke (X x Y x Z) | 300 x 200 x 200 mm[1] | 300 x 200 x 200 mm[5] |
| Stroke at low magnification with type TZ | 250 x 200 x 200 mm[1] | — |
| Power source | AC100 - 240V, 50 / 60Hz[4] | — |
| Power consumption | 5A-2.5A[1] | — |
| Minimum readout | 0.01 μm[1] | — |
| Maximum workpiece weight | 20 kg[1] | — |
| Measuring uncertainty EUX, MPE EUY, MPE | 1.2+4L/1000 μm[1] | — |
| Measuring uncertainty EUXY, MPE | 2+4L/1000 μm[1] | — |
| Z measurement uncertainty EUZ, MPE | 1.2+5L/1000 μm[1] | — |
| Camera | Black & white 1/3” CCD, color 1/3” CCD (option) for type 1, 2 and A only[1] | — |
| Auto focus | TTL laser AF and vision AF for type 1, 2, 3, 4 and TZ; vision AF standard and laser AF optional for type A[1] | — |
| Illumination | LED episcopic and diascopic illuminators; LED 8-segment ring illuminator; darkfield illuminators for type TZ[1] | Diascopic, Episcopic, 8-segment LED ring illumination (3 incident angles)[5] |
| Dimensions and weight, main unit & table | 700 x 730 x 1795 mm; 245 kg[1] | — |
| Dimensions and weight, controller | 190 x 450 x 440 mm; 15 kg[1] | — |
| Footprint | 2100 x 1100 mm[1] | — |
| Auto Focus | — | Laser AF, Image AF (* If Type A selected, Laser AF is optional)[5] |
| CCD Camera | — | B&W 1/3 CCD·Color 1/3 CCD (Color: type 1, 2 and A only)[5] |
| Type 1 | — | 0.5 - 7.5x · 9.33 x 7 - 0.622 x 0.467 mm[5] |
| Type 2 | — | 1 - 15x · 4.67 x 3.5 - 0.311 x 0.233 mm[5] |
| Type 3 | — | 2 - 30x · 2.33 x 1.75 - 0.155 x 0.117 mm[5] |
| Type 4 | — | 4 - 60x · 1.17 x 0.875 - 0.07 x 0.068 mm[5] |
| Type TZ | — | 1 - 120x · 4.67 x 3.5 - 0.039 x 0.029 mm[5] |
| Type A | — | 0.35 - 3.5x · 13.3 x 10 - 1.33 x 1 mm[5] |
| Guaranteed Loading Capacity (Weight) | — | 20 kg[5] |
| Power Source | — | AC100 - 240V, 50 / 60Hz[5] |
| Power Consumption | — | 5-2.5A[5] |
| Measurement Accuracy (XY 1 axis) | — | 1.2 + 4L / 1000μm[5] |
| Measurement Accuracy (XY 2 axis) | — | 2.0 + 4L / 1000μm[5] |
| Measurement Accuracy (Z axis) | — | 1.2 + 5L / 1000μm[5] |
| Magnification / Field of View - Type 1 | — | 0.5 - 7.5x · 9.33 x 7 - 0.622 x 0.467 mm[5] |
| Magnification / Field of View - Type 2 | — | 1 - 15x · 4.67 x 3.5 - 0.311 x 0.233 mm[5] |
| Magnification / Field of View - Type 3 | — | 2 - 30x · 2.33 x 1.75 - 0.155 x 0.117 mm[5] |
| Magnification / Field of View - Type 4 | — | 4 - 60x · 1.17 x 0.875 - 0.07 x 0.068 mm[5] |
| Magnification / Field of View - Type TZ | — | 1 - 120x · 4.67 x 3.5 - 0.039 x 0.029 mm[5] |
| Magnification / Field of View - Type A | — | 0.35 - 3.5x · 13.3 x 10 - 1.33 x 1 mm[5] |