Nikon
VMZ R 3020
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Nikon VMZ R 3020 is an automated measuring system. The Nikon VMZ R 3020 is a CNC video measuring system. The Nikon VMZ R 3020 has a 300 x 200 x 200 mm stroke.[1][2][3][4]
What it is
How it works
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical1
Wafer handling1
Optics & imaging4
Control & software1
Dimensions & facilities3
Configuration & options12
- Nexiv Microscope[5]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Type 1 | — | — | Standard magnification zooming head with Nikon 15× zoom optics, long working distance, wide FOV, and NA 0.35. | exceltechnologies.com[3] |
| Type 2 | — | — | Standard magnification zooming head with Nikon 15× zoom optics, long working distance, wide FOV, and NA 0.35. | exceltechnologies.com[3] |
| Type 3 | — | — | Standard magnification zooming head with Nikon 15× zoom optics, long working distance, wide FOV, and NA 0.35. | exceltechnologies.com[3] |
| Type 4 | — | — | High magnification zooming head with Nikon 15× and 120× zoom optics and NA 0.46. | exceltechnologies.com[3] |
| Type TZ | — | — | High magnification zooming head with Nikon 15× and 120× zoom optics and NA 0.46. | exceltechnologies.com[3] |
| Type A | — | — | Wide field-of-view zooming head with Nikon 10× zoom optics, widest FOV, longest working distance, and NA 0.11. | exceltechnologies.com[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power sourceAC100 - 240V, 50 / 60Hz[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measuring stroke does the Nikon VMZ R 3020 provide?
The Nikon VMZ R 3020 provides a 300 x 200 x 200 mm stroke. The type TZ configuration provides a 250 x 200 x 200 mm stroke at low magnification.[1][3][4]
What kinds of specimens is the Nikon VMZ R 3020 intended to measure?
The Nikon VMZ R 3020 is suitable for small components such as mechanical parts, molded parts, and high-density PCBs.[1][3][4]
Not publicly documented
The following facts about the VMZ R 3020 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the VMZ R 3020 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the VMZ R 3020 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the VMZ R 3020 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the VMZ R 3020 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the VMZ R 3020 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]exceltechnologies.com — exceltechnologies.comexceltechnologies.com
- [4]Nikon NEXIV | Nikon Singapore | VMZ-R3020 — micro-optics.com.sgmicro-optics.com.sg
- [5]inventory listing
Last updated Oct 13, 2026.