Waferpedia

Comparison ledger

Exceed 2000 AversusExceed 2000 AHversusExceed 2000 Ion

Nissin Exceed 2000 A, Nissin Exceed 2000 AH, Nissin Exceed 2000 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMNissinNissinNissin
CategoryIon ImplantationIon ImplantationIon Implantation
Wafer size———
Process node———
Introduced———
Production run———
Lifecycle———
Lifecycle milestones———
Control system———
Generation———
FamilyNissin Exceed 2000Nissin Exceed 2000Nissin Exceed 2000
Specifications
GasAr, Arsenic, BF3, PH3[1]Ar, Arsenic, BF3, PH3[5]—
SOWin 2000 Japan[1]——
ConfigurationMissing:[1]—Medium current[6]
OSJDOS[2]JDOS[5]—
CategoryIon Implantation[3]——
Wafer size8-inch wafers[4]—8"[6]
Gas deliveryAr, Arsenic, BF3, PH3[3]——
Missing itemsturbo, dry pump, bsm power supply, all mfcs[2]——
Operating System—JDOS 1998 Vintage[5]—
OEM——Nissin[7]
Model——Exceed 2000[7]
Equipment type——Ion Implanter[7]
Current class——Medium current[6]
Vintage——1996[7]

Plan your fab

Building a Ion Implantation process? Get a complete equipment list.

Open the fab equipment planner →
Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing