Comparison ledger
Nissin Exceed 2000 A, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Exceed 2000 ANissin | |
|---|---|---|
| OEM | Nissin | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nissin Exceed 2000 | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Gas | Ar, Arsenic, BF3, PH3[1] | — |
| SO | Win 2000 Japan[1] | — |
| Configuration | Missing:[1] | Platen ADV-S Type[5] |
| OS | JDOS[2] | — |
| Category | Ion Implantation[3] | Ion Implantation[6] |
| Wafer size | 8-inch wafers[4] | — |
| Gas delivery | Ar, Arsenic, BF3, PH3[3] | — |
| Missing items | turbo, dry pump, bsm power supply, all mfcs[2] | — |
| Type | — | ESC Platen ADV-S Type[5] |
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