Comparison ledger
Nordson March AP 1000, Nordson March AP 300, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | March AP 1000Nordson | March AP 300Nordson |
|---|---|---|
| OEM | Nordson | Nordson |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nordson March | Nordson March |
| Specifications | ||
| Frequency | 50 Hz[1] | — |
| CB Current | 25 A[1] | — |
| SCCR | 10 kA[1] | — |
| Configuration | Includes vacuum pump & RF generator[2] | 100-240 V[5] |
| RF Generator Power (optional) | 600 W or 1000 W (Seren, 13.6 MHz)[3] | — |
| Vacuum Pump | Included (dry or wet pump options)[4] | — |
| Power | 50 Hz[2] | 2 kVA[5] |
| Vacuum | Included (dry or wet pump options)[2] | — |
| RF Generator Power | 600 W or 1000 W (Seren, 13.6 MHz)[2] | — |
| Phase | — | 1 Phase[5] |
| RF Generator | — | 300 Watt, 13.56 MHz[5] |
| Gas delivery | — | 2 gas sources can be plumbed into system[5] |
| MFCs | — | Built in MFCs[5] |
| Vacuum pump | — | Vacuum pump included[5] |
| Control | — | Advanced PLC Controllers, Touch Screen, GUI Software Interface[5] |
| Safety | — | Full System Safety Enclosure[5] |
| Automated tuning | — | Integrated RF Automated Tuning Network[5] |
| Vintage | — | 2010[5] |
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