Waferpedia

Nordson

March AP 300

EtchNordson March family
Research Quality: 30% complete
March AP 300 — Inventory photo
Fig. 01March AP 300Inventory photo[1]

Power

100-240 V[1]

Vacuum

Vacuum pump[1]

Gas delivery

2 gas sources can be plumbed into system[1]

What is it?

The Nordson March AP 300 is a plasma system with a 300 Watt, 13.56 MHz RF generator and an integrated RF automated tuning network assembly.

What do the numbers mean?

Power & electrical4

100-240 V[1]
Accurate?
50/60 Hz[1]
Accurate?
300 Watt, 13.56 MHz RF Generator[1]
Accurate?
Integrated RF Automated Tuning Network[1]
Accurate?

Vacuum & pumping1

Vacuum pump[1]
Accurate?

Gas & chemistry1

2 gas sources can be plumbed into system[1]
Accurate?

Control & software2

Advanced PLC Controllers[1]
Accurate?
Touch Screen - GUI Software Interface[1]
Accurate?

Configuration & options6

Phase
1 Phase[1]
Accurate?
Power
2 kVA[1]
Accurate?
Assembly[1]
Accurate?
Built in MFCs[1]
Accurate?
Power and ground shelves (2)[1]
Accurate?
Full System Safety Enclosure[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration100-240 V[1]
  • Configuration50/60 Hz[1]
  • Configuration300 Watt, 13.56 MHz RF Generator[1]
  • ConfigurationIntegrated RF Automated Tuning Network[1]
  • Configuration2 gas sources can be plumbed into system[1]
  • ConfigurationVacuum pump[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the March AP 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the March AP 300 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the March AP 300 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the March AP 300 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the March AP 300 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the March AP 300 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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