Waferpedia

Comparison ledger

80 BW AR Wafer Maskversus1000P

SCREEN 80 BW AR Wafer Mask, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMSCREENYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1998 Acquisition
Control system——
Generation——
FamilySCREEN 80 BW AR Wafer MaskYES 1000P
Specifications
Model—1000P[1]
System type—Plasma cleaning system[1]
Shelf configuration—Four 16 x 16 inch shelves[1]
Total capacity—1024 square inches[1]
Control system—PLC driven with plain English real time process readout and diagnostics in the event of system abort[1]
Number of shelves—4[1]
Shelf size—16 x 16 inches[1]
Power—1000 W[2]
Configuration—Parallel plate[2]
Operation modes—Active, RIE, Downstream[1]
Sample size range—From smallest semiconductor chip to large flat panels[1]
Type—Plasma cleaning system[1]
Shelves—Four 16 x 16 inch shelves[1]
Control—PLC driven with plain English real time process readout and diagnostics in the event of system abort[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]semistarcorp.comsemistarcorp.com