Waferpedia

Comparison ledger

SS 80 BW AR Waferversus003163-000 SRD

SCREEN SS 80 BW AR Wafer, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMSCREENSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SS 80Semitool 003163-000 SRD
Specifications
SoftwareSYS Ver 394 F[1]—
Configuration2 Reverser[1]—
Chuck Type/ MaterialStainless Steel / Teflon, Nylon[1]—
MFC5 Horiba SEC 4600[1]—
Robot TypeDNS[1]—
TypeWafer scrubber[2]—
Wafer size8 inch[1]—
CategoryWet Processing / Clean[2]—
Make—Semitool[3]
Model—003163-000[3]
Equipment type—Spin Rinse Dryer (SRD)[3]
Asset #—139375[3]
Last Confirm Date—September 03, 2025[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing