Waferpedia

Comparison ledger

WD 620 Cversus11600 SRD

SCREEN WD 620 C, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
WD 620 CSCREEN
11600 SRDSemitool
OEMSCREENSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer sizefor Si and SiC base wafer—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN WD 620 CSemitool 11600 SRD
Specifications
Wafer sizefor Si and SiC base wafer[1]—
Configuration—Ceramic[2]
Manufacturer—Semitool[2]
Model—11600 SRD[2]
Equipment type—Spin Rinse Dryer[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing