Waferpedia

SCREEN

WD 620 C

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SCREEN WD 620 C is a wet bench. SCREEN WD 620 C is used for Si and SiC base wafer. SCREEN WD 620 C is categorized for wet processing and clean.[1][2]

WD 620 C — Inventory photo
Fig. 01WD 620 CInventory photo[1]

What it is

The SCREEN WD 620 C is a wet bench used for wet processing and cleaning of silicon and silicon carbide wafers. The equipment is manufactured by SCREEN.[1][2]

How it works

General reference — not yet source-verified

A wet bench typically consists of a series of chemical baths arranged linearly or in a cluster. Wafers are carried in a basket that is moved from bath to bath manually or by a robotic transport system. The process parameters such as immersion time, chemical temperature, and agitation are controlled by a programmable logic controller.

After chemical treatment, wafers are rinsed with deionized water to remove residual chemicals and then dried using spin drying or a nitrogen blow-off station integrated into the bench.

Where it fits in the process flow

General reference — not yet source-verified

For silicon carbide wafers, wet processing steps are critical to remove subsurface damage and to prepare the surface for epitaxial growth or metal contact formation.

Applications

General reference — not yet source-verified

Silicon carbide wafers are used in applications such as power semiconductor devices, LEDs, and RF components. Wet processing of these wafers includes cleaning, etching, and surface activation. The wet bench is also suitable for silicon wafer processing in standard integrated circuit manufacturing.

What do the numbers mean?

Wafer handling2

Wafer size
for Si and SiC base wafer[2]
Accurate?
Wafer base
Si and SiC[1]
Accurate?

Configuration & options6

Manufacturer
SCREEN[2]
Accurate?
Model
WD 620 C[1]
Accurate?
Tool type
Wet bench[1]
Accurate?
Category
Wet Processing / Clean[2]
Accurate?
OEM
SCREEN / DNS[1]
Accurate?
Equipment type
Wet Bench[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the SCREEN WD 620 C?

The SCREEN WD 620 C is a wet bench.[1]

What wafer materials does the SCREEN WD 620 C support?

The SCREEN WD 620 C is for Si and SiC base wafer.[1]

Not publicly documented

The following facts about the WD 620 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WD 620 C are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WD 620 C are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WD 620 C are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WD 620 C are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WD 620 C is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 17, 2026.

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